NEWPORT 优铂特 GM50A013101SMM020 GM50A Metal Sealed 10-50,000 sccm Mass Flow Controllers
Mass Flow Controller, 10 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal
概览
The G-Series GM50A013101SM020 metal-sealed, digitally-controlled mass flow controller has a Full Scale Flow Range of 10 sccm and a control range of 0.2 to 10 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. It utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
技术参数
类型
Mass Flow Controller
校准气体
N2 (or equivalent)
满量程流量范围
10 sccm
最大入口压力
150 psig
正常工作压差
10 - 40 psid
验证压力
1000 psig
爆破压力
1500 psig
配件类型
0.25 in. Swagelok-style
控制范围
0.2 - 10 sccm
流量输入输出信号
0 - 5 VDC
连接器类型
15-pin D-sub (tied grounds)
典型精度
±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
重复精度
± 0.3% of Reading
分辨率
0.1% of Full Scale
零温度系数
<0.05% of Full Scale/°C
跨度温度系数
<0.08% of Reading/°C
入口压力系数
<0.02% of Reading/psi
典型稳定时间
<750 msec, typical above 5% Full Scale
预热时间
30 minutes
工作温度范围
10 - 50°C
存储湿度
0 - 95% Relative Humidity, non-condensing
存储温度范围
-20 to 80°C
外部泄漏完整性
<1 x 10-09 (scc/sec He)
通过关闭阀门泄漏完整性
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
润湿材料
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
密封材料
Metal
表面光洁度
10µ inch average Ra (electropolished)
CE 认证
Yes
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