NEWPORT 优铂特 GE50A013204RMV020 GE50A Viton Sealed 10-50,000 sccm Mass Flow Controllers
Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
概览
The G-Series GE50A013204RMV020 digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 20,000 sccm and a control range of 400 to 20,000 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal.
技术参数
类型
Mass Flow Controller
校准气体
N2 (or equivalent)
满量程流量范围
20000 sccm
最大入口压力
150 psig
正常工作压差
10 to 40 psid
验证压力
1000 psig
爆破压力
1500 psig
配件类型
4 VCR male
控制范围
400 - 20000 sccm
流量输入输出信号
0 - 5 VDC
连接器类型
15-pin D-sub (tied grounds)
典型精度
±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
重复精度
±0.3% of Reading
分辨率
0.1% of Full Scale
零温度系数
Coefficient<0.05% of Full Scale/°C
跨度温度系数
<0.08% of Reading/°C
入口压力系数
<0.02% of Reading/psi
典型稳定时间
<750 msec, typical above 5% Full Scale
预热时间
30 minutes
工作温度范围
10 - 50°C
存储湿度
0 to 95% Relative Humidity, non-condensing
存储温度范围
-20 to 80°C
外部泄漏完整性
<1 x 10-09 (scc/sec He)
通过关闭阀门泄漏完整性
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
润湿材料
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
密封材料
Viton
表面光洁度
16µ inch average Ra
CE 认证
Yes
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