NEWPORT 优铂特 1179C01314CR1BV 1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Contro
Mass Flow Controller, 10,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
概览
The 1179C01314CR1BV is a general purpose mass flow controller with an Viton seal, rated for 10,000 sccm Full Scale (N2), with 4 VCR male fittings, and a 15-pin D-sub electrical connector. It is designed to measure and control the flow of gases in a wide variety of applications. 1179 Mass-Flo® controllers can also be used as a pressure controller when connected to a suitable pressure transducer. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.
技术参数
Type
Mass Flow Controller
Full Scale Flow Range
10000 sccm
Control Range
200 - 10000 sccm
Calibration Gas
N2 (or equivalent)
Fitting Type
4 VCR male
Seal Material
Viton
Flow Input Output Signal
0 - 5 VDC
Analog Connector
15-pin D-sub
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
15 - 40 psid (with atmospheric pressure at the MFC outlet)
Typical Accuracy
±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
Repeatability
<0.05% of Full Scale/°C
Resolution
<0.08% of Reading/°C
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Typical Settling Time
<2 sec (per SEMI Guideline E17-91)
Warm-up Time
<2 min (to within 0.2% of Full Scale of steady state performance)
Operating Temperature
0 - 50°C
External Leak Integrity
<1 x 10-9
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
Wetted Materials
316L stainless steel, Viton®, nickel
Compliance
CE
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