NEWPORT 优铂特 GM50A013103SMM020 GM50A Metal Sealed 10-50,000 sccm Mass Flow Controllers
Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal
概览
The G-Series GM50A013103SMM020 metal-sealed, digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
技术参数
类型
Mass Flow Controller
校准气体
N2 (or equivalent)
满量程流量范围
1000 sccm
最大入口压力
150 psig
正常工作压差
10 - 40 psid
验证压力
1000 psig
爆破压力
1500 psig
配件类型
0.25 in. Swagelok-style
控制范围
20 - 1000 sccm
流量输入输出信号
0 - 5 VDC
连接器类型
15-pin D-sub (tied grounds)
典型精度
±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
重复精度
± 0.3% of Reading
分辨率
0.1% of Full Scale
零温度系数
<0.05% of Full Scale/°C
跨度温度系数
<0.08% of Reading/°C
入口压力系数
<0.02% of Reading/psi
典型稳定时间
<750 msec, typical above 5% Full Scale
预热时间
30 minutes
工作温度范围
10 - 50°C
存储湿度
0 - 95% Relative Humidity, non-condensing
存储温度范围
-20 to 80°C
外部泄漏完整性
<1 x 10-09 (scc/sec He)
通过关闭阀门泄漏完整性
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
润湿材料
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
密封材料
Metal
表面光洁度
10µ inch average Ra (electropolished)
CE 认证
Yes
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